Controlled deposition and growth of polycrystalline films in a vacuum



Dec. 6, 1966 H. E. T. GOWEN 3,290,557

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUMOriginal Filed Sept. 23, 1960 21 Sheets-$heet 1 I l ""KZO j \JUUINVENTOR. HAMMOND E. T. GOWEN Attorney Dec. 6, 1966 H. E T. GOWEN3,290,567

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUMOriginal Filed Sept. 25, 1960 21 Sheets-Sheet 2 V 2|9 W x w 1| 2:8

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CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUMOriginal Filed Sept. 23. 1960 21 Sheets-Sheet 3 INVENTOR. HAMMOND E. T.GOWEN Attorney 1956 H. E. T. GOWEN CONTROLLED DEPOSITION AND GROWTH OFPOLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 23, 1960 21Sheets-$heet =2 INVENTOR. HAMMOND E. T. GOWEN AHomey Dec. 6, 1966 H. E.T. GOWEN 3, 0,

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUMOngmal Filed Sept. 23, 1960 21 Sheets$heet 5 v M m SCI AVA r INVENTOR.HAMMOND E. T. GOWEN BY EX Attorney Dec. 6, 1966 H. E. T. GOWENCONTROLLED DEPOSITION AND GROWTH O FOLYCRYSTALLINE FILMS IN A VACUUMOriginal Filed Sept. 25, 1960 HAMMO 21 Sheets-Sheet 6 INVENTOR. ND E. TGOWEN Dec. 6, 1966 GQWEN 3,290,567

CONTROLLED DEPOSITION AND GROWTH OF FOLYCRYSTALLINE FILMS IN A VACUUMOriginal Filed Sept. 25, 1960 21 sheets sheet 7 INVENTOR. HAMMOND E. T.GOWEN Attorney o 4 O 7 9 6 I m w M m M AU, MW 3 NW, N W 9 0 2 m N m W 3m u H 1 m S n W m C. f w E 1 3 v D f 2 I I 6 1 N g 0 m o E 3 M Y 9 M O AB m H w o MM H. E. T. GOWEN CONTROLLED DEPOSITION AND GROWTH OFPOLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 23. 1960 Attorney1966 H E. T. GOWEN 3,290,567

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUMOrigmal Filed Sept. 23, 1960 21 Sheets$heet ll INVENTOR. HAMMOND E. T.GOW E N Attorney Dec. 6, 1966 E gow 3,290,567

H. CONTROLLED DEPOSITION AND GROWTH OF POLYGRYSTALLINE FILMS IN A VACUUMOriginal Filed Sept. 23, 1960 21 Sheets-Sheet 12 "5k up INVENTOR.

HAMMOND E. T. GOWEN orney Dec. 6, 1966 H. E. "r. GOWEN 3,290,567

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUMOriginal Filed Sept. 23, 1960 21 Sheets-Sheet l3 IN V EN TOR.

HAMMOND E.T. GOWEN Attorney Dec. 6, 1966 H. E. T. GOWEN 3,290,567CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUMOriginal Filed Sept. 23. 1960 21 Sheets-Sheet 14 3508 z J I 1 I I I7- fI I I 'i X/g 350i I I I, I I 1 g I, I I i" I I INVENTOR.

HAMMOND E. T. GOWEN Attorney Dec. 6, 1966 H. E. GOWEN 3,290,567

CONTROLLED DEP TION AND GR H 0F LYCRYSTALLINE FILMS IN A UUM OngmalFiled Sept. 1960 21 Sheets-$heet 15 7 ill INVENTOR.

HAMMOND E. T. GOWEN Attorney Dec. 6, 1966 H. E. T. GOWEN CONTROLLEDDEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM OriginalFiled Sept. 23, 1960 21 Sheets-Sheet 16 INVENTOR.

HAMMOND E. T. GOWEN Attorney Dec. 6, 1966 H E. T. GOWEN 3,290,567

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUMOriginal Filed Sept. 25, 1960 21 Sheets*Sheet 17 5695 505 U U U 5601 FME E :1 W 5612 5608 D sen H 2 2 mu '1 n i l NIH 56|4 ['ll I) m inn, T C

ii g jsil m hw mm. m n n M W 5609 INVENTOR. HAMMOND E. T. GOWEN Attorney5, 1966 H. E. 'r. GOWEN CONTROLLED DEPOSITION AND GROWTH OFPOLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 25. 1960 21Sheets-Sheet 18 INVENTOR.

HAMMOND E. T. GOWEN Attorney 1965 H. E. T. GOWEN CONTROLLED DEPOSITIONAND GROWTH POLYCRYSTALLINE FILMS IN A VAC-UH Original Filed Sept. 25,1960 INVENTOR. HAMMOND E. T. GOWEN Attorney 7M- Dec. 6, 1966 H. E. T.GOWEN 3,290,567

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUMOriginal Filed Sept. 25, 1960 21 Sl1eets-$heet 20 INVENTOR. HAMMOND E.T. GOWEN Atiorney

6. IN AN ARTICLE OF MANUFACTURE, A SUBSTRATE, A CRYSTALLINE COATING ONSAID SUBSTRATE, SAID COATING COMPRISING A PLURALITY OF MONOCRYSTALSJOINED IN BOUNDARIES IN THE DIRECTION SUBSTANTIALLY PARALLEL TO THESURFACE OF THE SUBSTRATE, SAID MONOCRYSTALS IN A DIRECTION AWAY FROM THESURFACE OF SAID SUBSTRATE BEING A SINGLE CRYSTALLOGRAPHIC STRUCTUREHAVING AN INCLINATION PARALLEL TO AN AXIS OF THE